Axcelis Technologies Inc.

	Dec-13	Dec-14	Dec-15	Dec-16	Dec-17	Dec-18	Dec-19	Dec-20	Dec-21	Dec-22
Cashflowfinancing_Cash at beginning of period	45 M	46 M	32 M	86 M	78 M	141 M	185 M	147 M	204 M	881 M
Total net income	0	0	0	0	0	0	0	0	0	0
Cashflowoperating_Depreciation	5 M	5 M	5 M	4 M	5 M	6 M	8 M	10 M	11 M	9 M
Cashflowoperating_Deferred income taxes	-1 M	1 M	779000	519000	-82 M	11 M	3 M	5 M	20 M	6 M
Cashflowoperating_Other non-cash items	0	0	0	0	0	0	0	0	0	0

Cashflowoperating_(Increase) Decrease in receivables	-12 M	-7 M	5 M	-14 M	-24 M	-4 M	-6 M	-1 M	-18 M	-77 M
Cashflowoperating_(Increase) Decrease in inventories	2 M	-12 M	-16 M	-7 M	-11 M	-11 M	-18 M	-18 M	-39 M	-50 M
Cashflowoperating_(Increase) Decrease in other current assets	0	0	0	0	0	0	0	0	0	0
Cashflowoperating_(Increase) Decrease in payables	7 M	772000	6 M	810000	25 M	-703000	-19 M	18 M	22 M	18 M
Cashflowoperating_(Increase) Decrease in other current liabilities	133000	-212000	-46000	102000	14000	196000	-162000	332000	0	0
Other changes	-17 M	-3 M	17 M	6 M	142 M	45 M	18 M	56 M	154 M	188 M
Cashflowoperating_Net cash from continuing operations	-15 M	-16 M	18 M	-9 M	56 M	47 M	-14 M	70 M	150 M	93 M

Cashflowinvesting_Purchase of property plant & equipment	-336000	-567000	-2 M	-3 M	-7 M	-5 M	-12 M	-7 M	-9 M	-7 M
Cashflowinvesting_Acquisitions	0	0	0	0	0	0	0	0	0	0
Cashflowinvesting_Other investing changes net	0	0	0	0	0	0	0	0	0	0
Cashflowinvesting_Sale of short term investments	0	0	0	0	0	0	0	0	0	0
Cashflowinvesting_Purchase of short term investments	0	0	0	0	0	0	0	0	0	0
Cashflowinvesting_Sale of Float term investments	0	0	0	0	0	0	0	0	0	0
Cashflowinvesting_Purchase of Float term investments	0	0	0	0	0	0	0	0	0	0
Other changes	485000.0	-896000.0	-2 M	-2 M	-7 M	-5 M	-12 M	-7 M	-9 M	-40 M
Cashflowinvesting_Net cash from investing activities	485000	-896000	-2 M	-2 M	-7 M	-5 M	-12 M	-7 M	-9 M	-40 M

Cashflowfinancing_Issuance of capital stock	2 M	3 M	4 M	3 M	16 M	3 M	6 M	9 M	5 M	2 M
Cashflowfinancing_Repurchase of capital stock	0	0	0	0	0	0	-18 M	-8 M	-50 M	-45 M
Cashflowfinancing_Payment of cash dividends	0	0	0	0	0	0	0	0	0	0
Cashflowfinancing_Issuance of debt	15 M	0	0	0	0	0	0	0	0	0
Cashflowfinancing_Repayment of debt	0	-470000	-15 M	0	0	0	0	-399000	-763000	-728000
Cashflowfinancing_Other financing charges net	-1 M	-115000	48 M	-157000	-1 M	-1 M	-2 M	-4 M	-7 M	-9 M
Cashflowfinancing_Net cash from financing activities	16 M	3 M	38 M	2 M	15 M	1 M	-13 M	-2 M	-52 M	-53 M

Cashflowfinancing_Net change in cash & cash equivalents	1 M	-14 M	54 M	-9 M	64 M	43 M	-39 M	60 M	89 M	-366000
Cashflowfinancing_Cash at end of period	46 M	31 M	86 M	78 M	141 M	185 M	147 M	204 M	296 M	895 M

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